arXiv AI By Dain Kwon, Changmin Shin, Sunjong Park, Kanghyun Choi, Hyeyoon Lee, Jaewon Jang, Minseok Choi, Jinho Lee

SePArate: Segmenting Patterns from Defects in Wafer Manufacturing Using Weak Supervision

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SePArate is a weakly supervised method for segmenting patterns from defects in semiconductor wafers. It uses only image‑level annotations and follows a three‑phase training process: encoder pretraining, knowledge transfer for spatial cues, and training on synthetic mixed‑defect data. Experiments show that SePArate outperforms baseline approaches in pixel‑level defect segmentation.

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