arXiv:2606. 08908v1 Announce Type: cross Abstract: Semiconductor lithography inspection requires reliable detection of small pattern defects such as bridge, burr, pinch, and contamination.
Machine-generated by The Flow from the publisher's headline and feed description — not written or checked by a human. The full article lives at arXiv AI.
arXiv:2604. 26633v2 Announce Type: replace-cross Abstract: Industrial surface defect inspection suffers from a fundamental data bottleneck: defects are rare, annotations require expert knowledge, and collecting balanced training sets is slow and costly.
arXiv:2607. 10826v1 Announce Type: cross Abstract: Automated evaluation is essential for scaling generative 3D systems, where exhaustive human review is costly and slow.
Despite generating increasingly photorealistic images, text-to-image (T2I) models still exhibit localized, subtle, and structurally complex failures. Diagnosing these failures requires instance-level feedback that answers where a defect occurs, what type it is, why it is defective, and its importance to overall image quality.
SePArate is a weakly supervised method for segmenting patterns from defects in semiconductor wafers. It uses only image‑level annotations and follows a three‑phase training process: encoder pretraining, knowledge transfer for spatial cues, and training on synthetic mixed‑defect data. Experiments show that SePArate outperforms baseline approaches in pixel‑level defect segmentation.
Automated evaluation is essential for scaling generative 3D systems, where exhaustive human review is costly and slow. However, the reliability of an automated judge depends on the entire evaluation pipeline, not only the underlying vision-language model (VLM), but also how assets are rendered, what visual evidence is provided, how the task is specified, and how human reference labels are constructed.
CF-YOLO introduces a real‑time detection framework for camouflaged micro‑defects on industrial components, combining a Context‑Perception Aggregation Module (CPAM) that fuses large‑kernel macro‑texture cues with small‑kernel boundary details, and a Feature Additive Refinement Module (FARM) that globally refines fine‑grained anomaly representations. The authors also release the Copper Tube Defect Dataset (CTDD), a benchmark of 1,847 images with 4,898 annotated defect boxes. Experiments show CF‑YOLO outperforms baseline detectors such as YOLOv11 by 2.2% in mAP@50 and 3.9% in Precision while preserving real‑time speed.