arXiv Machine Learning

LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching

arXiv:2606. 00228v1 Announce Type: new Abstract: In semiconductor manufacturing, lithography projects circuit layouts onto silicon wafers through an optical mask.

arXiv AI
Jun 11

Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction

arXiv:2606. 11247v1 Announce Type: cross Abstract: Generative models are increasingly used to propose designs, data, and control actions for physical systems, yet many such systems are governed by hard physical constraints rather than by perceptual plausibility.

By Yaser Mike Banad, Sarah Sharif
arXiv Machine Learning
6d ago

Forward and Inverse Virtual Metrology for Phototransistor Gain: A Hierarchical, Uncertainty-Aware Approach for Small Production Datasets

arXiv:2608. 11868v1 Announce Type: new Abstract: The customization, optimization and stabilization of the process flow of a silicon bipolar phototransistor commits months of cleanroom time before a finished device can be measured, so a model that predicts device gain from process parameters before a run has value out of proportion to its accuracy.

By Mahshid Amirabgir, Lorenza Ferrario, Paolo Conci, Mahdieh Amirabgir, Giancarlo Orengo
arXiv Machine Learning
Jul 10

Joint Discrete-Continuous Flow Matching for Open-Vocabulary Inverse Design of Multilayer Optical Coatings

arXiv:2607. 08392v1 Announce Type: cross Abstract: Amortized neural inverse design typically remains closed-world: component choices are fixed vocabulary tokens, coordinate grids are frozen at training time, and continuous variables are discretized into sequence tokens.

By Zhiyi Li, Yuheng Jin, Yidan Huang, Nan Chen, Hongyan Fu, Yikun Bu
arXiv Machine Learning
Jun 9

Optimizing Few-Step Generation with Adaptive Matching Distillation

arXiv:2602. 07345v2 Announce Type: replace-cross Abstract: Distribution Matching Distillation (DMD) is a powerful acceleration paradigm, yet its stability is often compromised in Forbidden Zone, regions where the real teacher provides unreliable guidance while the fake teacher exerts insufficient repulsive force.

By Lichen Bai, Zikai Zhou, Shitong Shao, Wenliang Zhong, Shuo Yang, Shuo Chen, Bojun Chen, Zeke Xie
arXiv Machine Learning
Jul 17

Trajectory-Aware Flow Matching for Topology Optimisation

arXiv:2607. 14652v1 Announce Type: new Abstract: Topology optimisation (TO) often requires repeated finite element analysis and sensitivity-based material updates, which can be costly when multiple candidate designs are needed under varying physical and design conditions.

By Shusheng Xiao, Jinshuai Bai, Hyogu Jeong, Yunfei Xi, Yilin Gui, YuanTong Gu
Hugging Face Trending Papers
Aug 6

Energy-Guided Flow Matching

Pixel-space generative models bypass lossy latent compression, yet necessitate joint learning of global structure and fine-grained details in a high-dimensional space. Standard flow matching interpolates noise toward a fixed clean-image endpoint, leaving the spectral evolution to be learned implicitly.

arXiv Machine Learning
Jul 21

Routing by Reaching: Composition of Pre-trained GFlowNets for Multi-Objective Generation

arXiv:2602. 21565v3 Announce Type: replace Abstract: Generative Flow Networks (GFlowNets) learn to sample diverse candidates in proportion to a reward function, making them well-suited for scientific discovery, where exploring multiple promising solutions is crucial.

By Seokwon Yoon, Youngbin Choi, Seunghyuk Cho, Seungbeom Lee, MoonJeong Park, Dongwoo Kim