arXiv AI

LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography

arXiv:2606. 26713v1 Announce Type: new Abstract: As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance.

arXiv AI
Jun 11

Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction

arXiv:2606. 11247v1 Announce Type: cross Abstract: Generative models are increasingly used to propose designs, data, and control actions for physical systems, yet many such systems are governed by hard physical constraints rather than by perceptual plausibility.

By Yaser Mike Banad, Sarah Sharif
arXiv Machine Learning
Jun 19

Evolutionary Two-Stage Hyperparameter Optimization Strategies for Physics-Informed Neural Networks

arXiv:2606. 20442v1 Announce Type: new Abstract: Physics-Informed Neural Networks (PINNs) solve Partial Differential Equations (PDEs) by embedding physical laws into neural network training.

By Fedor Buzaev (HSE University), Dmitry Efremenko (HSE University), Egor Bugaev (HSE University), Andrei Ermakov (HSE University, AXXX), Denis Derkach (HSE University), Daria Pugacheva (HSE University, AXXX), Fedor Ratnikov (HSE University)
arXiv Machine Learning
Aug 13

Forward and Inverse Virtual Metrology for Phototransistor Gain: A Hierarchical, Uncertainty-Aware Approach for Small Production Datasets

arXiv:2608. 11868v1 Announce Type: new Abstract: The customization, optimization and stabilization of the process flow of a silicon bipolar phototransistor commits months of cleanroom time before a finished device can be measured, so a model that predicts device gain from process parameters before a run has value out of proportion to its accuracy.

By Mahshid Amirabgir, Lorenza Ferrario, Paolo Conci, Mahdieh Amirabgir, Giancarlo Orengo