arXiv:2606. 00228v1 Announce Type: new Abstract: In semiconductor manufacturing, lithography projects circuit layouts onto silicon wafers through an optical mask.
By Yao Lai, Xuyuan Xiong, Zeyue Xue, Guojin Chen, Jing Wang, Xihui Liu, Rui Zhang, Robert Mullins, Bei Yu, Ping Luo
arXiv:2606. 26713v1 Announce Type: new Abstract: As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance.
By Yuqi Jiang, Yumeng Liu, Zimu Li, Jinyuan Deng, Qian Jin, Yucheng Cui, Yu Li, Xunzhao Yin, Qi Sun, Cheng Zhuo
arXiv:2606. 11247v1 Announce Type: cross Abstract: Generative models are increasingly used to propose designs, data, and control actions for physical systems, yet many such systems are governed by hard physical constraints rather than by perceptual plausibility.
By Yaser Mike Banad, Sarah Sharif
arXiv:2603. 15925v2 Announce Type: replace Abstract: Inverse design aims to find design parameters $x$ achieving target performance $y^*$.
By Miguel de Campos, Werner Krebs, Hanno Gottschalk
arXiv:2606. 04850v1 Announce Type: cross Abstract: Designing a neural network processor is an end-to-end co-design problem: network architecture and training budget determine the inference workload; hardware mapping decisions determine chip area, latency, and energy; and these characteristics govern fabrication yield and manufacturing cost.
By Yuyang Du, Yujun Huang, Gioele Zardini
arXiv:2607. 23469v1 Announce Type: cross Abstract: Photonic-crystal surface-emitting lasers (PCSELs) can combine high-power operation with narrow-divergence surface emission, but optimizing coupled parameters requires costly full-wave simulations.
By Longying Wen, Feiyang Wu, Jinglin Yu, Chongxian Yuan, Renjie Li, Zhaoyu Zhang