arXiv AI By Yuqi Jiang, Yumeng Liu, Zimu Li, Jinyuan Deng, Qian Jin, Yucheng Cui, Yu Li, Xunzhao Yin, Qi Sun, Cheng Zhuo

LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography

Read the original on arXiv AI →

arXiv:2606. 26713v1 Announce Type: new Abstract: As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance.

Summary generated by The Flow from the publisher's feed. The full article lives at arXiv AI.

arXiv AI
Jun 11

Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction

arXiv:2606. 11247v1 Announce Type: cross Abstract: Generative models are increasingly used to propose designs, data, and control actions for physical systems, yet many such systems are governed by hard physical constraints rather than by perceptual plausibility.

By Yaser Mike Banad, Sarah Sharif