arXiv Computer Vision By Seungjun Chu, Seokhyun Chung

Morphology-Aware Ambiguity Learning for Wafer Defect Decision Support

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The paper introduces a morphology‑aware ambiguity learning framework for wafer defect decision support. It enables three diagnostic actions—automatic single‑class diagnosis, assisted diagnosis with two plausible defect classes, and full review—by constructing a class‑level ambiguity matrix from wafer map characteristics. Experiments on the WM‑811K dataset demonstrate that the framework outperforms traditional methods, offering meaningful two‑class alternatives and reserving full review for truly ambiguous cases, with consistent performance across different backbone architectures.

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