arXiv:2606. 25753v1 Announce Type: new Abstract: Gradient-based inverse lithography technology~(ILT) for extreme ultraviolet~(EUV) masks is presented.
arXiv:2607. 25330v1 Announce Type: cross Abstract: We present a physics-informed neural operator (PINO) trained with pseudo-spectral frequency-domain (PSFD) equations for electromagnetic (EM) scattering problems in EUV lithography.
arXiv:2606. 28119v1 Announce Type: cross Abstract: We introduce a physics-constrained neural network (PCNN) for the rapid prediction of rigorous coupled-wave analysis (RCWA) outputs in the form of Jones matrices.
arXiv:2606. 26713v1 Announce Type: new Abstract: As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance.
arXiv:2606. 00228v1 Announce Type: new Abstract: In semiconductor manufacturing, lithography projects circuit layouts onto silicon wafers through an optical mask.
arXiv:2608. 09382v1 Announce Type: cross Abstract: Electromagnetic inverse scattering is a nonlinear and ill-posed problem, where accurate reconstruction is challenging due to measurement limitations, noise, and high computational costs, especially for 3-D imaging.
Metasurfaces enable precise manipulation of electromagnetic waves for applications such as beam steering, sensing, and stealth technology. However, inverse design of metasurfaces with targeted EM responses remains challenging due to the computational expense of iterative full wave simulation driven optimization and the limited conditioning fidelity and diversity of existing generative approaches.
arXiv:2608. 05839v1 Announce Type: cross Abstract: Deep neural networks have shown great empirical success in the solution of a wide variety of ill-posed inverse problems in imaging.
arXiv:2606. 28158v1 Announce Type: new Abstract: Physics-informed neural networks (PINNs) have recently emerged as a promising framework for addressing the Calder\'on inverse problem from limited boundary data.
arXiv:2607. 07682v1 Announce Type: new Abstract: The inverse design of physical systems governed by partial differential equations is computationally demanding due to the high dimensionality and non-convexity of design spaces.
The inverse design of physical systems governed by partial differential equations is computationally demanding due to the high dimensionality and non-convexity of design spaces. Generative models for inverse design often lack robustness and transferability, whereas evolutionary strategies are robust but struggle in high-dimensional spaces.
arXiv:2607. 08392v1 Announce Type: cross Abstract: Amortized neural inverse design typically remains closed-world: component choices are fixed vocabulary tokens, coordinate grids are frozen at training time, and continuous variables are discretized into sequence tokens.
arXiv:2402. 17750v2 Announce Type: replace-cross Abstract: Controlled multimode wave propagation can enable more space-efficient photonic processors than architectures based on discrete components connected by single-mode waveguides.