arXiv AI By Doyun Kim, Werner Gillijns

Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation

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arXiv:2607. 25330v1 Announce Type: cross Abstract: We present a physics-informed neural operator (PINO) trained with pseudo-spectral frequency-domain (PSFD) equations for electromagnetic (EM) scattering problems in EUV lithography.

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