arXiv Machine Learning By Yao Lai, Xuyuan Xiong, Zeyue Xue, Guojin Chen, Jing Wang, Xihui Liu, Rui Zhang, Robert Mullins, Bei Yu, Ping Luo

LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching

Read the original on arXiv Machine Learning →

arXiv:2606. 00228v1 Announce Type: new Abstract: In semiconductor manufacturing, lithography projects circuit layouts onto silicon wafers through an optical mask.

Summary generated by The Flow from the publisher's feed. The full article lives at arXiv Machine Learning.

arXiv AI
Jun 11

Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction

arXiv:2606. 11247v1 Announce Type: cross Abstract: Generative models are increasingly used to propose designs, data, and control actions for physical systems, yet many such systems are governed by hard physical constraints rather than by perceptual plausibility.

By Yaser Mike Banad, Sarah Sharif
arXiv Machine Learning
6d ago

Forward and Inverse Virtual Metrology for Phototransistor Gain: A Hierarchical, Uncertainty-Aware Approach for Small Production Datasets

arXiv:2608. 11868v1 Announce Type: new Abstract: The customization, optimization and stabilization of the process flow of a silicon bipolar phototransistor commits months of cleanroom time before a finished device can be measured, so a model that predicts device gain from process parameters before a run has value out of proportion to its accuracy.

By Mahshid Amirabgir, Lorenza Ferrario, Paolo Conci, Mahdieh Amirabgir, Giancarlo Orengo