arXiv Machine Learning By Yao Lai, Xuyuan Xiong, Zeyue Xue, Guojin Chen, Jing Wang, Xihui Liu, Rui Zhang, Robert Mullins, Bei Yu, Ping Luo

LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching

Read the original on arXiv Machine Learning →

arXiv:2606. 00228v1 Announce Type: new Abstract: In semiconductor manufacturing, lithography projects circuit layouts onto silicon wafers through an optical mask.

Machine-generated by The Flow from the publisher's headline and feed description — not written or checked by a human. The full article lives at arXiv Machine Learning.

arXiv AI
Aug 28

PICasso: An AI-Enabled Design Framework for Autonomous Optimization of Silicon Photonic Devices

PICasso is an AI‑enabled framework that converts natural‑language specifications into manufacturable silicon photonic integrated circuits (PICs) through a structured pipeline of NL → YAML → GDS, PDK‑aware knowledge injection, automated placement and routing, DRC/LVS validation, and SAX‑based photonic simulation. The authors introduce PIC‑Set, a benchmark of 36 parameterized PIC design tasks, and evaluate several large language models (LLMs) using new metrics such as structural and functional Spec@k, optimization efficiency, and robustness. Across the benchmark, PICasso markedly improves specification satisfaction, achieving up to 92.7% structural Spec@3 and 52% functional Spec@3, while reducing mean insertion loss from 4.98 dB to 3.25 dB through simulation‑guided optimization.

By Deepak Vungarala, Deniz Najafi, Abdulrahman Aljoudi, Zahra Ghanaatian, Navid Khoshavi, Gourav Datta, Arman Roohi, Mahdi Nikdast, Shaahin Angizi
arXiv AI
Jun 11

Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction

arXiv:2606. 11247v1 Announce Type: cross Abstract: Generative models are increasingly used to propose designs, data, and control actions for physical systems, yet many such systems are governed by hard physical constraints rather than by perceptual plausibility.

By Yaser Mike Banad, Sarah Sharif