The paper proposes an all‑reflective two‑mirror projection system for EUV lithography that achieves a 4× demagnification at a numerical aperture close to unity (NA≈0.993). Unlike conventional EUV objectives that use 6–10 aspheric mirrors and have <15 % throughput, the design uses a fixed two‑reflection path for each accepted diffraction order, retaining 50–60 % of the power and eliminating order‑dependent phase shifts. The authors optimize 30‑bilayer Bragg coatings for each mirror facet, formulate a 3‑D vector model for a two‑dimensionally periodic mask, and use inverse lithography with a differentiable modal solver to demonstrate simulated sub‑10‑nm aerial images with resolved peaks up to 5 nm defocus.
arXiv:2606. 25753v1 Announce Type: new Abstract: Gradient-based inverse lithography technology~(ILT) for extreme ultraviolet~(EUV) masks is presented.
arXiv:2609. 00899v1 Announce Type: cross Abstract: We present a direct optimization method for three-dimensional freeform reflectors that transform the light of a finite-\'etendue source into a prescribed far-field angular intensity distribution.
The paper introduces ADIS, a compact, cost‑effective, calibration‑free snapshot spectral imaging system that uses only a diffractive lens, a binary mask, and a Bayer‑filtered sensor. ADIS disperses and multiplexes wavelengths, mapping energy to distinct sensor locations, and employs theoretically computed PSFs for calibration‑free spectral reconstruction. The authors further present the Orthogonal Diffraction‑Aware Unfolding Voxel Shift Transformer (ODAUVST) to solve the sparsely‑constrained inverse problem, achieving full‑resolution recovery with reduced parameters and demonstrating superior performance in real SSI experiments.
arXiv:2605.15418v2 Announce Type: cross Abstract: Hybrid optical systems combining refractive and diffractive optical responses have the potential to support new types of optical behavior, but they a...
arXiv:2607. 08392v1 Announce Type: cross Abstract: Amortized neural inverse design typically remains closed-world: component choices are fixed vocabulary tokens, coordinate grids are frozen at training time, and continuous variables are discretized into sequence tokens.
The paper presents a collaborative on‑sensor array camera that uses a distributed meta‑optics learning method to jointly optimize a 100‑million‑nanopost metasurface array for broadband visible imaging. By training the array end‑to‑end with a learned meta‑atom proxy and a parallax‑aware, noise‑aware reconstruction algorithm, the design overcomes the wavelength‑dependent limitations of traditional metalenses. Experimental results show that the camera delivers consistent image quality across varying scene illumination spectra without relying on generative reconstruction.
arXiv:2608. 11860v1 Announce Type: cross Abstract: Data-driven inverse design enables efficient generation of nanophotonic structures with prescribed optical responses, but spectrum-to-geometry mapping remains challenging due to non-uniqueness and fine geometric features.
The paper introduces 3D Point Splatting (3DPS), a differentiable point renderer for millimeter‑wave radar that directly implements the radar equation with an explicit material model and complex‑valued outputs. Unlike previous methods, 3DPS preserves phase information and supports multiple output formats (ADC, CRP, RA) without retraining. On six outdoor ColoRadar scenes, it achieves a mean Pearson correlation of 0.587 on held‑out RA images, outperforming optical‑NVS baselines by 1.7× to 5.2× and trains in roughly three minutes per scene on a single RTX 4090.
The paper introduces 3D Point Splatting (3DPS), a differentiable point renderer for millimeter-wave radar that directly implements the radar equation with an explicit material model and complex-valued outputs. Unlike prior methods, 3DPS simultaneously provides physical fidelity, complex-valued rendering, and multi-viewpoint tractability, enabling a single optimized scene to generate ADC, complex range profile, and range-azimuth images via FFT pipelines. On six outdoor ColoRadar scenes, 3DPS achieves a mean Pearson correlation of 0.587 on held-out range-azimuth images, outperforming optical-NVS baselines by 1.7x to 5.2x, and trains in about three minutes per scene on an RTX 4090.
arXiv:2607. 25330v1 Announce Type: cross Abstract: We present a physics-informed neural operator (PINO) trained with pseudo-spectral frequency-domain (PSFD) equations for electromagnetic (EM) scattering problems in EUV lithography.
arXiv:2607. 02015v1 Announce Type: cross Abstract: Mirror Illusion Art is a novel reflection-conditioned 3D illusion where one object yields two target appearances (front and mirror).
The paper introduces a unified large language model workflow for modeling and inverse-design of metasurfaces across multiple families. By converting geometries, design parameters, and optical responses into a shared instruction‑following text format, the authors fine‑tune Gemma‑2‑9B on eight distinct metasurface families. Compared to single‑family models, the joint model predicts all families’ optical responses simultaneously and reduces mean‑squared error by an average of 56.5%. "whyItMatters":"The approach demonstrates that a shared sequence‑based LLM interface can streamline cross‑family metasurface design, eliminating the need for separate surrogate architectures for each geometry class."