arXiv Machine Learning By Davide Frizzo, Francesco Borsatti, Gian Antonio Susto

Uncertainty and Business-Aware Remaining Useful Life Estimation for Semiconductor Manufacturing

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The paper presents a predictive maintenance framework for semiconductor manufacturing that combines deep learning sequence models with simultaneous quantile regression to provide uncertainty‑aware remaining useful life (RUL) estimates. It evaluates several architectures—including state‑space models—on ion‑milling data from the 2018 PHM Data Challenge, showing that the Diagonal State Space (S4D) model delivers the most accurate RUL predictions across quantiles. Compared to preventive maintenance baselines, the S4D approach significantly reduces business costs by avoiding unnecessarily early interventions.

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