arXiv AI By Angel Yanguas-Gil

Evaluating LLM-based AI agents integrated with materials synthesis tools: the case of atomic layer deposition

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The article reviews methods for assessing large language model (LLM) based AI agents in materials synthesis, focusing on their integration with experimental tools. It outlines evaluation strategies—including knowledge, reasoning, tool‑use, and closed‑loop benchmarks—and applies them to atomic layer deposition (ALD) as a case study. A practical framework for evaluating LLMs in this context is also presented.

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