arXiv:2608. 14678v1 Announce Type: cross Abstract: With the progress of the semiconductor industry toward increasingly complex compute devices and tighter process tolerances, advanced process control has become crucial.
Summary generated by The Flow from the publisher's feed. The full article lives at arXiv AI.
arXiv:2606. 09892v1 Announce Type: new Abstract: Textual event records, such as alarm logs, have become an increasingly common data source in engineering and manufacturing systems.
arXiv:2607. 24819v1 Announce Type: cross Abstract: Wafer fabrication exhibits unique characteristics, including reentrant process flows, variable bottlenecks, and highly variable process conditions.
arXiv:2607. 08555v1 Announce Type: new Abstract: The operational integrity of complex industrial systems relies on precise anomaly detection and diagnosis.
arXiv:2501. 02672v4 Announce Type: replace-cross Abstract: Granger causality (GC) is widely used to infer directed relationships in time-series data.
The operational integrity of complex industrial systems relies on precise anomaly detection and diagnosis. The vast majority of existing methods narrowly focus on capturing temporal similarities of representations, often overlooking the disruption of internal causal relationships, which characterizes system failures and latent anomalies.
arXiv:2607. 18226v1 Announce Type: new Abstract: Causal discovery methods have shown strong performance in temporal systems, but they typically rely on regular and discrete lag structures, limiting their applicability to regularly sampled data.